The effects of substrate bias voltage and radio-frequency power on the growth of c-BN phase coatings

Surface and Coatings Technology

Volumn 113, Issue 1-2, 1999, Pages 25-30

  Chen, Guanghua ^a,b   Zhang, Xingwang ^b   Wang, Bo ^a   Yan, Hui ^a  

^a BEIJING UNIVERSITY OF TECHNOLOGY   (China)

^b LANZHOU UNIVERSITY   (China)

Author keywords

Cubic boron nitride; Infrared spectroscopy; RF sputtering; Thin films

Indexed keywords

CUBIC BORON NITRIDE; FILM PREPARATION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; SUBSTRATES; THIN FILMS;

BIAS VOLTAGE; RADIOFREQUENCY SPUTTERING;

SPUTTER DEPOSITION;

EID: 0032625370     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(98)00813-5     Document Type: Article

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