Simple resonating microstructures for gas pressure measurement

Journal of Micromechanics and Microengineering

Volumn 12, Issue 3, 2002, Pages 204-210

  Brown, Keith B ^a   Allegretto, Walter ^a   Vermeulen, Fred E ^a   Robinson, Alexander M ^a  

^a UNIVERSITY OF ALBERTA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; DAMPING; MICROSTRUCTURE; NATURAL FREQUENCIES; OSCILLATORS (ELECTRONIC); RESONANCE; SENSORS;

PRESSURE SENSORS;

PRESSURE MEASUREMENT;

EID: 0036573104     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/12/3/303     Document Type: Article

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