Measuring the deflection of CMOS micromachined cantilever devices using a piezoresistive sensor

Canadian Journal of Electrical and Computer Engineering

Volumn 25, Issue 1, 2000, Pages 3-7

  Ma, Yuan ^a   Robinson, Alexander M ^a   Lawson, Ron P W ^a   Brown, Keith B ^a   Strembicke, Derek ^b   Allegretto, Walter ^a   Zhou, Tiansheng ^a  

^a UNIVERSITY OF ALBERTA   (Canada)

^b Optical ETC Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CIRCUIT RESONANCE; COMPUTER SIMULATION; DEFLECTION (STRUCTURES); INTEGRATED CIRCUIT LAYOUT; INTEGRATED CIRCUIT MANUFACTURE; MICROELECTROMECHANICAL DEVICES; MICROSENSORS; NATURAL FREQUENCIES; PIEZOELECTRIC TRANSDUCERS; RESISTORS; SILICON SENSORS;

CMOS MICROMACHINED CANTILEVER DEVICES;

CMOS INTEGRATED CIRCUITS;

EID: 0033893384     PISSN: 08408688     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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