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Surface Science
Volumn 505, Issue , 2002, Pages 349-357
Effect of mass and incidence angle of keV energy polyatomic projectiles in silicon sputtering
(3)
Medvedeva, M
a
Wojciechowski, I
a
Garrison, B J
a
a
PENNSYLVANIA STATE UNIVERSITY
(
United States
)
Author keywords
Computer simulations; Energy dissipation; Silicon; Sputtering
Indexed keywords
COMPUTER SIMULATION; ENERGY DISSIPATION; ION BOMBARDMENT; MICROSCOPIC EXAMINATION; MOLECULAR DYNAMICS; SILICON;
POLYATOMIC PROJECTILES;
SPUTTERING;
EID
:
0036570066
PISSN
:
00396028
EISSN
:
None
Source Type
:
Journal
DOI
:
10.1016/S0039-6028(02)01387-0
Document Type
:
Article
Times cited : (
13
)
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.
