SCOPUS 정보 검색 플랫폼

Journal of Non-Crystalline Solids

Volumn 303, Issue 1, 2002, Pages 88-93

Dielectric properties of Zr-Sn-Ti-O thin films prepared by pulsed laser deposition

(4) Lu, X B a Wang, Y P a Ling, H Q a Liu, Z G a

a NANJING UNIVERSITY (China)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; CRYSTALLIZATION; DIELECTRIC MATERIALS; DIFFERENTIAL THERMAL ANALYSIS; LEAKAGE CURRENTS; MOS DEVICES; PERMITTIVITY; PULSED LASER DEPOSITION; RAPID THERMAL ANNEALING; SUBSTRATES; TRANSMISSION ELECTRON MICROSCOPY;

CAPACITANCE-VOLTAGE (C-V) CHARACTERISTICS;

THIN FILMS;

EID: 0036567812 PISSN: 00223093 EISSN: None Source Type: Journal
DOI: 10.1016/S0022-3093(02)00971-7 Document Type: Article

Times cited : (6)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.