Dependence of oriented BN films on Si(100) substrate temperature

Journal of Crystal Growth

Volumn 241, Issue 1-2, 2002, Pages 261-265

  Zhou, H ^a   Wang, R Z ^a   Huang, A P ^a   Wang, M ^a   Wang, H ^a   Wang, B ^a   Yan, H ^a  

^a BEIJING UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

A1. Desorption; A1. Stresses; B1. Nitrides; B2. Piezoelectric materials

Indexed keywords

COMPRESSIVE STRESS; CRYSTAL GROWTH; CRYSTAL ORIENTATION; DESORPTION; ION BOMBARDMENT; MAGNETRON SPUTTERING; PIEZOELECTRIC MATERIALS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SUBSTRATES; THERMAL EFFECTS;

CRYSTALLINITY;

METALLIC FILMS;

EID: 0036565849     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(02)01240-X     Document Type: Article

References (23)