Influence of the sputtering gas composition on the properties of thin boron nitride thin films

Diamond and Related Materials

Volumn 7, Issue 8, 1998, Pages 1184-1189

  Méndez, Juan Manuel ^a   Ramírez, Efrén ^a   Gaona Couto, Adriana ^b  

^a UNIVERSIDAD NACIONAL AUTÓNOMA DE MÉXICO   (Mexico)

^b YORK UNIVERSITY   (Canada)

Author keywords

Boron nitride; D.c. Bias; FTIR; Sputtering

Indexed keywords

ALUMINUM; CUBIC BORON NITRIDE; FOURIER TRANSFORM INFRARED SPECTROSCOPY; MAGNETRON SPUTTERING; STAINLESS STEEL;

BIAS VOLTAGE;

THIN FILMS;

EID: 0032136315     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(98)00173-3     Document Type: Article

References (21)

1. G. Demezeau, Diamond Relat. Mater. 2 (1993) 197.
2. R. Pintaske, Th. Welzel, N. Kahl, M. Schaller, J. Hahn, F. Richter, Surf. Coat. Technol. 90 (1997) 275.
3. P.B. Mirkarimi, K.F. McCarty, G.F. Cardinale, D.L. Medlin, D.K. Ottensen, H.A. Johnsen, J. Vac. Sci. Technol. A14 (1996) 251.
4. S. Kidner, C.A. Taylor, R. Clarke, Appl. Phys. Lett. 64 (1994) 1859.
5. K.L. Barth, A. Lunk, J. Ulmer, Surf. Coat. Technol. 92 (1997) 96.
6. M. Mieno, T. Yoshida, Surf. Coat. Technol. 52 (1992) 87.
7. K. Bewilogua, J. Buth, H. Hübsch, M. Grischke, Diamond Relat. Mater. 2 (1993) 1206.
8. J. Hahn, F. Richter, M. Röder, E. Schneider, R. Pintaske, Th. Welzel, Surf. Coat. Technol. 92 (1997) 129.
9. R.C. Weast (Ed.), CRC Handbook of Chemistry and Physics, CRC Press, Boca Raton, FL, 69th edn, 1988-89, p. B-127.
10. L. Hackenberg, Ph.D. Thesis, Pennsylvania State University, 1995.
11. Th. Welzel, R. Pintaske, F. Richter, Plasma Source Sci. Technol., in press.
12. P.B. Mirkarimi, K.F. McCarty, D.L. Medlin, W.G. Wolfer, T.A. Friedmann, G.F. Cardinale, D.G. Howitt, J. Mater. Res. 9 (1994) 2925.
13. W.G. Sainty, P.J. Martin, R.P. Netterneid, D.R. McKenzie, D.J.H. Cockayne, D.M. Dwarte, J. Appl. Phys. 64 (1988) 3980.
14. O. Burat, D. Bouchier, V. Stamboulli, G. Gautherin, J. Appl. Phys. 68 (1990) 2780.
15. J. Hahn, M. Friederich, R. Pintaske, M. Schaller, N. Kahl, D.R.T. Zahn, F. Richter, Diamond Relat. Mater. 5 (1996) 1103.
16. G.F. Cardinale, P.B. Mirkarimi, K.F. McCarty, E.J. Klaus, D.L. Medlin, W.M. Clift, D.G. Howitt, Thin Solid Films 253 (1994) 130.
17. S. Ulrich, J. Scherer, J. Schwan, I. Barzen, M. Scheiß, H. Erhardt, Appl. Phys. Lett. 68 (1996) 909.
18. S. Reinke, M. Kuhr, W. Kulisch, Diamond Relat. Mater. 5 (1996) 508.
19. S. Fahy, C.A. Taylor, II, R. Clarke, Phys. Rev. B 56 (1997) 12573.
20. E. Ramirez, B. Eng. Thesis, Universidad Nacional Autónoma de México, 1997.
21. T. Ikeda, Y. Kawate, Y. Hirai, J. Vac. Sci. Technol. A 8 (1990) 3168.