Measurements on micromachined silicon accelerometers with piezoelectric sensor action

Sensors and Actuators, A: Physical

Volumn 76, Issue 1-3, 1999, Pages 247-252

  Eichner, D ^a   Giousouf, M ^a   Von Munch W ^a  

^a UNIVERSITY OF STUTTGART   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; ATMOSPHERIC PRESSURE; CAPACITANCE; MICROMACHINING; NATURAL FREQUENCIES; PIEZOELECTRIC MATERIALS; Q FACTOR MEASUREMENT; SOL-GELS;

BULK MICROMACHINING; PIEZOELECTRIC LAYERS; READ OUT CAPACITORS;

SILICON SENSORS;

EID: 0343932616     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00039-4     Document Type: Article

References (3)

1. P. Kirby, Report on Brite Contract SEMDEFT (Sensors and mechatronic devices based on ferroelectric thin films), 2nd European Meeting on Integrated Ferroelectrics (EMIF2), Jouy-en-Josas, France, 1997.
2. Eichner D., Münch W.v. A two-step electrochemical etch-stop to produce freestanding bulk-micromachined structures. Sensors and Actuators A. 60:1997;103-107.
3. P. Gaucher, D. Eichner, J. Hector, W. von Münch, Piezoelectric bimorph cantilever for actuating and sensing applications, 2nd European Meeting on Integrated Ferroelectrics (EMIF2), Jouy-en-Josas, France, 1997.