Micromachined inertial sensors

IEEE International Conference on Intelligent Robots and Systems

Volumn 2, Issue , 1999, Pages 1049-1056

  Song, Cimoo ^a   Ha, Byeoungju ^a   Lee, Sukhan ^a  

^a Samsung Advanced Institute of Technology (SAIT)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ARTIFICIAL INTELLIGENCE; ETCHING; GRAIN SIZE AND SHAPE; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; OXIDATION; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING SILICON; SINGLE CRYSTALS; THIN FILMS;

INERTIAL SENSORS; INTELLIGENT SYSTEMS; POLYCRYSTALLINE THIN FILM; SACRIFICIAL LAYER; SURFACE MICROMACHINING;

MICROSENSORS;

EID: 0033348718     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (31)