Nanoscale characterization of hydrogenated and oxidized B-doped homoepitaxial diamond by conductive atomic force microscopy

Journal of Applied Physics

Volumn 91, Issue 7, 2002, Pages 4585-4589

  Zhang, L ^a   Sakai, T ^a,b   Yoshida, H ^a,b   Yamanaka, S ^c   Okushi, H ^c  

^a TOSHIBA CORPORATION   (Japan)

^b JAPAN FINE CERAMICS CENTER   (Japan)

^c NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CONDUCTIVE ATOMIC FORCE MICROSCOPY; CONDUCTIVITY DISTRIBUTIONS; H-TERMINATION; HIGH QUALITY; HOMOEPITAXIAL DIAMOND; HOMOEPITAXIAL FILMS; HYDROGENATED FILMS; IV CHARACTERISTICS; NANO SCALE; NANOSCALE CHARACTERIZATION; OXIDIZED FILMS; OXIDIZED SURFACES; SCHOTTKY; STEP EDGE; STRIPE PATTERN; STRUCTURAL DEPENDENCE; TOPOGRAPHY IMAGES;

ATOMIC FORCE MICROSCOPY; CONDUCTIVE FILMS; ELECTRIC PROPERTIES; NANOTECHNOLOGY; TOPOGRAPHY;

HYDROGENATION;

EID: 0036537113     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1456250     Document Type: Article

References (13)

1. F. Fontaine, C. Vzan-Suguy, B. Philosoph, and R. Kalish, Appl. Phys. Lett. 68, 2264 (1996). apl APPLAB 0003-6951
2. S. Yamanaka, D. Takeuchi, H. Watanabe, H. Okushi, and K. Kajimura, Diamond Relat. Mater. 9, 956 (2000). drm DRMTE3 0925-9635
3. D. M. Malta, J. A. Von Windheim, and B. A. Fox, Appl. Phys. Lett. 62, 23 (1993). apl APPLAB 0003-6951
4. S. Yamanaka, H. Watanabe, S. Masai, D. Takeuchi, H. Okushi, and K. Kajimura, Jpn. J. Appl. Phys., Part 1 37, 1129 (1998). jjb JAPNDE 0021-4922
5. K. Hayashi, S. Yamanaka, H. Okushi, and K. Kajimura, Appl. Phys. Lett. 68, 1220 (1996). apl APPLAB 0003-6951
6. K. Hayashi, S. Yamanaka, H. Watanabe, T. Sekiguchi, H. Okushi, and K. Kajimura, J. Cryst. Growth 183, 338 (1998). jcr JCRGAE 0022-0248
7. H. Okushi, Diamond Relat. Mater. 10, 281 (2001). drm DRMTE3 0925-9635
8. S. Yamanaka, H. Watanabe, S. Masai, T. Sekiguchi, D. Takeuchi, H. Okushi, and K. Kajimura, New Diamond Front. Carbon Technol. 9, 118 (1999). 9xv NDFTFF 1344-9931
9. S. Yamanaka, D. Takeguchi, H. Watanabe, H. Okushi, and K. Kajimura, Appl. Surf. Sci. 159-160, 567 (2000). asu ASUSEE 0169-4332
10. S. Masai, S. Yamanaka, H. Watanabe, S. Kanata, D. Takeuchi, T. Kurosu, and K. Kajimura, New Diamond Front. Carbon Technol. 9, 115 (1999). 9xv NDFTFF 1344-9931
11. T. Tsuno, T. Tomikawa, S. Shikuta, T. Imai, and N. Fujimori, Appl. Phys. Lett. 64, 1572 (1994). apl APPLAB 0003-6951
12. S. Yamanaka, D. Takeguchi, H. Watanabe, H. Okushi, and K. Kajimura, Phys. Status Solidi A 174, 59 (1999). psa PSSABA 0031-8965
13. L. Zhang, T. Sakai, N. Sakuma, T. Ono, and K. Nakayama, Appl. Phys. Lett. 75, 3527 (1999). apl APPLAB 0003-6951