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Volumn 621, Issue , 2000, Pages
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Sub-grain boundary spacing in directionally crystallized Si films obtained via sequential lateral solidification
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Author keywords
[No Author keywords available]
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Indexed keywords
CRYSTAL GROWTH;
DENSITY (SPECIFIC GRAVITY);
GRAIN BOUNDARIES;
MICROSTRUCTURE;
SEMICONDUCTING SILICON;
SOLIDIFICATION;
THERMAL STRESS;
SEQUENTIAL LATERAL SOLIDIFICATION;
THIN FILMS;
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EID: 0034429921
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1557/proc-621-q9.6.1 Document Type: Conference Paper |
Times cited : (15)
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References (15)
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