Orientation-dependence of low temperature epitaxial silicon growth

Materials Research Society Symposium - Proceedings

Volumn 664, Issue , 2001, Pages A2231-A2236

  Wagner, Thomas A ^a   Oberbeck, Lars ^a   Nerding, Melanie ^b   Strunk, Horst P ^b   Bergmann, Ralf B ^a  

^a UNIVERSITY OF STUTTGART   (Germany)

^b UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BACKSCATTERING; CRYSTAL ORIENTATION; DEPOSITION; DIFFRACTION; EPITAXIAL GROWTH; LOW TEMPERATURE EFFECTS; POINT DEFECTS; SEMICONDUCTING SILICON; SUBSTRATES;

EPITAXIAL THIN FILMS;

THIN FILMS;

EID: 0035556389     PISSN: 02729172     EISSN: None     Source Type: Journal    
DOI: 10.1557/proc-664-a22.3     Document Type: Article

References (16)