Some properties of sputtered a-C:H

Journal of Non-Crystalline Solids

Volumn 299-302, Issue PART 2, 2002, Pages 835-839

  Lazar, G ^a   Vascan, I ^a   Lazar, I ^a   Stamate, M ^a  

^a VASILE ALECSANDRI UNIVERSITY OF BACAU   (Romania)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; ELECTRIC POTENTIAL; HYDROGENATION; INFRARED SPECTROSCOPY; MAGNETRON SPUTTERING; SUBSTRATES;

AMORPHOUS CARBON FILMS; INFRARED ABSORPTION SPECTROSCOPY;

AMORPHOUS FILMS;

EID: 0036530662     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3093(01)00987-5     Document Type: Article

References (14)