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Diamond and Related Materials

Volumn 11, Issue 3-6, 2002, Pages 980-984

Structural characterization of hard a-C:H films as a function of the methane pressure

(5) Lacerda, R G a,b Stolojan, V b Cox, D C b Silva, S R P b Marques, F C a

a UNIVERSITY OF CAMPINAS (Brazil)

b UNIVERSITY OF SURREY (United Kingdom)

Author keywords

Diamond like carbon; Hardness; Mechanical properties; Stress

Indexed keywords

CHARACTERIZATION; DECOMPOSITION; ELECTRON ENERGY LOSS SPECTROSCOPY; FILM GROWTH; HARDNESS; HIGH PRESSURE EFFECTS; LIGHT TRANSMISSION; METHANE; RAMAN SPECTROSCOPY; STRESS ANALYSIS;

HARD FILMS;

DIAMOND LIKE CARBON FILMS;

CARBON; COATING; FILM; HARDNESS; MECHANICAL PROPERTY; PROTECTION; STRUCTURAL ANALYSIS;

EID: 0036508331 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/S0925-9635(01)00677-X Document Type: Article

Times cited : (6)

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