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Diamond and Related Materials

Volumn 11, Issue 3-6, 2002, Pages 301-306

In situ plasma diagnostics of the chemistry behind sulfur doping of CVD diamond films

(5) Petherbridge, J R a May, P W a Fuge, G M a Rosser, K N a Ashfold, M N R a

a UNIVERSITY OF BRISTOL (United Kingdom)

Author keywords

In situ diagnostics; Mass spectrometry; Optical emission spectrometry; Sulfur doping

Indexed keywords

CARBON INORGANIC COMPOUNDS; CHEMICAL VAPOR DEPOSITION; DOPING (ADDITIVES); MASS SPECTROMETRY; MOLECULAR BEAMS; PLASMA DIAGNOSTICS; SILICON; SUBSTRATES; X RAY PHOTOELECTRON SPECTROSCOPY;

MOLE FRACTIONS;

DIAMOND FILMS;

DIAMOND;

EID: 0036508236 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/S0925-9635(01)00576-3 Document Type: Article

Times cited : (40)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.