Molecular beam mass spectrometry studies of nitrogen additions to the gas phase during microwave-plasma-assisted chemical vapour deposition of diamond

Diamond and Related Materials

Volumn 8, Issue 2-5, 1999, Pages 226-230

  Leeds, S M ^a   May, P W ^a   Ashfold, M N R ^a   Rosser, K N ^a  

^a UNIVERSITY OF BRISTOL   (United Kingdom)

Author keywords

CVD diamond; Microwave plasma; Molecular beam mass spectrometry; Nitrogen

Indexed keywords

AMMONIA; CHEMICAL VAPOR DEPOSITION; FREE RADICALS; MASS SPECTROMETRY; METHANE; MICROWAVES; MOLECULAR BEAMS; NITROGEN; PLASMA APPLICATIONS;

MICROWAVE PLASMA CHEMICAL VAPOR DEPOSITION (MPCVD); MOLECULAR BEAM MASS SPECTROMETRY;

DIAMOND FILMS;

EID: 0032614254     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(98)00299-4     Document Type: Article

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