Hydrogen concentrations and mass density obtained by X-ray and neutron reflectivity on hydrogenated amorphous carbon nitride thin films

Diamond and Related Materials

Volumn 11, Issue 3-6, 2002, Pages 1188-1192

  Santucci, S ^a   Lozzi, L ^a   Valentini, L ^b   Kenny, J M ^b   Menelle, A ^c  

^a UNIVERSITY OF L'AQUILA   (Italy)

^b UNIVERSITY OF PERUGIA   (Italy)

^c CEA SACLAY   (France)

Author keywords

Carbon nitride; Neutron reflectivity; Raman spectroscopy; X ray reflectivity

Indexed keywords

CARBON NITRIDE; DECOMPOSITION; DOPING (ADDITIVES); ELECTROMAGNETIC WAVE REFLECTION; FILM GROWTH; GRAPHITIZATION; HYDROGEN; HYDROGENATION; NEUTRON SCATTERING; PLASMAS; RAMAN SPECTROSCOPY; THIN FILMS; X RAY ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

MASS DENSITY;

AMORPHOUS FILMS;

CARBON NITRIDE; FILM; HYDROGENATION; SPECTROSCOPY; THICKNESS;

EID: 0036508140     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(01)00740-3     Document Type: Article

References (23)