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Diamond and Related Materials

Volumn 11, Issue 3-6, 2002, Pages 1149-1152

XPS characterization of the composition and bonding states of elements in CNx layers prepared by ion beam assisted deposition

(5) Ujvari T a Kolitsch, A b Toth A a Mohai, M a Bertoti I a

a CHEMICAL RESEARCH CENTER (Hungary)

b INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH (Germany)

Author keywords

C3N4; Ion beam assisted deposition; Nitrides; X ray photoelectron spectroscopy

Indexed keywords

CHEMICAL BONDS; COMPOSITION; EVAPORATION; GRAPHITE; ION BEAM ASSISTED DEPOSITION; THERMODYNAMIC STABILITY; X RAY PHOTOELECTRON SPECTROSCOPY;

BONDING STATES;

SILICON WAFERS;

NITRIDE;

EID: 0036508089 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/S0925-9635(01)00716-6 Document Type: Article

Times cited : (26)

References (23)

1
- 20444373328
- (1989) Science , vol.245 , pp. 841
- Liu, Y.¹ Cohen, M.L.²

2
- 35949014198
- (1990) Phys. Rev. B , vol.41 , pp. 1072
- Liu, Y.¹ Cohen, M.L.²

3
- 0032692055
- (1999) Diamond Relat. Mater , vol.8 , pp. 1809
- Muhl, S.¹ Méndez, J.M.²

4
- 0000360882
- (1995) Int. J. Modern Phys. B , vol.9 , pp. 3527
- Marton, D.¹ Boyd, K.J.² Rabalais, J.W.³

5
- 0031212446
- (1997) Surf. Interface Anal , vol.25 , pp. 629
- Baker, A.¹ Hammer, P.²

6
- 4243856801
- (1998) Phys. Rev. B , vol.57 , pp. 2536
- Souto, S.¹ Pickholz, M.² dos Santos, M.C.³ Alvarez, F.⁴

7
- 0034245212
- (2000) Surf. Interface Anal , vol.30 , pp. 538
- Bertóti, I.¹ Tóth, A.² Mohai, M.³ Ujvári, T.⁴

8
- 0031186143
- (1997) Thin Solid Films , vol.304 , pp. 183
- Taki, Y.¹ Kitagawa, T.² Takai, O.³

9
- 0002924710
- (1997) J. Electron. Spectrosc. Relat. Phenom , vol.87 , pp. 45
- Zheng, W.T.¹ Xing, K.Z.² Hellgren, N.³

10
- 0033165187
- (1999) Diamond Relat. Mater , vol.8 , pp. 1315
- Hsu, C.-Y.¹ Hong, F.C.-N.²

11
- 0000425478
- (1998) Phys. Rev. B , vol.58 , pp. 2207
- Ronning, C.¹ Feldermann, H.² Merk, R.³ Hofsäss, H.⁴ Reinke, P.⁵ Thiele, J.-U.⁶

12
- 0010029489
- (1996) Appl. Phys. Lett , vol.69 , pp. 1698
- Tabbal, M.¹ Merel, P.² Moisa, S.³ Chaker, M.⁴ Ricard, A.⁵ Moisan, M.⁶

13
- 0033165094
- (1999) Diamond Relat. Mater , vol.8 , pp. 1175
- Matsumoto, S.¹ Xie, E.-Q.² Izumi, F.³

14
- 0033513825
- (1999) Nucl. Instr. Meth. B , vol.148 , pp. 645
- Bertóti, I.¹ Mohai, M.² Tóth, A.³ Zelei, B.⁴

15
- 33751154539
- (1995) Chem. Mater , vol.7 , pp. 257
- Kawaguchi, M.¹ Nozaki, K.²

16
- 0032594139
- (1999) Diamond Relat. Mater , vol.8 , pp. 1720
- Motsukura, N.¹ Akita, K.²

17
- 0029390415
- (1995) Surf. Coat. Technol , vol.74 , pp. 704
- Weber, F.-R.¹ Oechsner, H.²

18
- 0033689107
- (2000) Surf. Coat. Technol , vol.128-129 , pp. 126
- Kolitsch, A.¹ Möller, W.² Malkow, T.³ Bull, S.J.⁴ Magula, V.⁵ Domankova, M.⁶

19
- 0003414260
- TRIM, Version 95.9, IBM Research, Yorktown Heights, NY 10598, USA
- (1995) Transport of Ions in Matter
- Biersack, J.P.¹ Ziegler, J.F.²

20
- 0035330555
- (2001) Solid State Ionics , vol.141-142 , pp. 63
- Ujvári, T.¹ Tóth, A.² Mohai, M.³ Szépvölgyi, J.⁴ Bertóti, I.⁵

21
- 0001328644
- (1994) J. Chem. Soc. Faraday Trans , vol.90 , pp. 327
- Jenneskens, L.W.¹ Mahy, J.W.G.² Vliestra, E.J.³

22
- 0033513871
- (1999) Nucl. Instr. Meth. B , vol.148 , pp. 1134
- Tóth, A.¹ Bell, T.² Bertóti, I.³ Mohai, M.⁴ Zelei, B.⁵

23
- 0001604115
- (1999) Phys. Rev. B , vol.60 , pp. 10855
- Snis, A.¹ Matar, S.F.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.