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Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 148, Issue 1-4, 1999, Pages 645-649

Effect of Ar+, N2+, He+ and H2+ bombardment on the composition and structure of CNx layers

(4) Bertoti I a Mohai, M a Toth A a Zelei, B a

a CHEMICAL RESEARCH CENTER (Hungary)

Author keywords

Carbon nitride; CNx; DC plasma; Ion bombardment; XPS

Indexed keywords

ARGON; CHEMICAL BONDS; GRAPHITE; HELIUM; HYDROGEN; INFRARED SPECTROSCOPY; ION BOMBARDMENT; MOLECULAR STRUCTURE; NITRIDES; NITROGEN; STOICHIOMETRY; X RAY PHOTOELECTRON SPECTROSCOPY;

CARBON NITRIDE;

AMORPHOUS FILMS;

EID: 0033513825 PISSN: 0168583X EISSN: None Source Type: Journal
DOI: 10.1016/S0168-583X(98)00839-8 Document Type: Article

Times cited : (13)

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