Fabrication of bragg grating structures in silicon

Physica Scripta T

Volumn 101, Issue , 2002, Pages 92-95

  Heimala, Paivi ^a   Aalto, T ^a   Yliniemi, S ^a   Simonen, J ^b   Kuittinen, M ^b   Turunen, J ^b   Leppihalme, M ^a  

^a VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

^b UNIVERSITY OF EASTERN FINLAND   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC GENERATORS; ELECTRON BEAMS; FIBER BRAGG GRATINGS; INDUCTIVELY COUPLED PLASMA; PLASMA ETCHING;

GRATING STRUCTURES;

SEMICONDUCTING SILICON;

EID: 0036437470     PISSN: 02811847     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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