Effects of grating heights on highly efficient unibond SOI waveguide grating couplers

IEEE Photonics Technology Letters

Volumn 12, Issue 1, 2000, Pages 59-61

  Ang, T W ^a   Reed, G T ^a   Vonsovici, A ^a   Evans, A G R ^b   Routley, P R ^b   Josey, M R ^b  

^a UNIVERSITY OF SURREY   (United Kingdom)

^b UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION GRATINGS; ELECTRON BEAM LITHOGRAPHY; INTEGRATED OPTICS; PERTURBATION TECHNIQUES; RECTANGULAR WAVEGUIDES; SILICON ON INSULATOR TECHNOLOGY; WAVEGUIDE COUPLERS;

WAVEGUIDE GRATING COUPLERS;

OPTICAL WAVEGUIDES;

EID: 0033874376     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/68.817493     Document Type: Article

References (14)

1. C. K. Tang and G. T. Reed, "Highly efficient optical phase modulator in SOI waveguides," Electron. Lett., vol. 31, no. 6, pp. 451-452, 1995.
2. A. G. Rickman, G. T. Reed, B. L. Weiss, and F. Namavar, "Low-loss planar optical waveguides fabricated in SIMOX material," IEEE Photon. Technol. Lett., vol. 4, no. 6, pp. 633-635, 1992.
3. A. G. Rickman and G. T. Reed, "Silicon on insulator optical rib waveguides: Loss, mode characteristics, bends and Y-junctions," Proc. Inst. Elect. Eng.-Optoelectronics, vol. 141, pp. 391-393, 1994.
4. G. V. Treyz, P. G. May, and J. M. Halbout, "Silicon Mach-Zehnder wave-guide interferometer based on the plasma dispersion effect," Appl. Phys, Lett, vol. 59, no. 7, pp. 771-773, 1991.
5. C. Z. Zhao, G. Z. Li, E. K. Liu, Y. Guo, and X. D. Liu, "Silicon-on-insulator Mach-Zehnder waveguide interferometers operating at 1.3 μm," Appl. Phys. Lett., vol. 67, no. 17, pp. 2448-2449, 1995.
6. T. W. Ang, P. D. Hewitt, A. Vonsovici, G. T. Reed, A. G. R. Evans, P. R. Routley, T. Blackburn, and R. Josey, "Integrated optics in Unibond for greater flexibility," in Proc. Electrochemical Soc., vol. 99-3, 1999, pp. 353-360.
7. T. Tamir and S. T. Peng, "Analysis and design of grating couplers," Appl. Phys., vol. 14, pp. 235-254, 1977.
8. K. C. Chang, "Surface-wave scattering by dielectric gratings with arbitrary profiles," Ph.D. dissertation, Polytechnic Inst. of New York, June 1979.
9. T. W. Ang, G. T. Reed, A. Vonsovici, A. G. R. Evans, P. R. Routley, T. Blackburn, and M. R. Josey, "Silicon-on-insulator based grating couplers," in Proc. PREP '99, UMIST, vol. 1, Manchester, U.K., 1999, pp. 108-110.
10. S. P. Pogossian, L. Vescan, and A. Vonsovici, "The single-mode condition for semiconductor rib waveguides with large cross section," J. Lightwave Technol., vol. 16, no. 10, pp. 1851-1583, 1998.
11. T. W. Ang, G. T. Reed, A. Vonsovici, A. G. R. Evans, P. R. Routley, T. Blackburn, and M. R. Josey, "Grating couplers using silicon-on-insulator," Proc. SPlE. vol. 3620, pp. 79-86, 1999.
12. A. Takashi, A. Yoshinobu, and N. Susumu, "High-efficiency blazed grating couplers," Appl. Phys. Lett., vol. 29, no. 5, pp. 303-304, 1976.
13. T. W. Ang, G. T. Reed, A. Vonsovici, A. G. R. Evans, P. R. Routley, and M. R. Josey, "0.15 dB/cm loss in unibond SOI waveguides," Electron. Lett., vol. 35, no. 12, pp. 977-978, 1999.
14. M. Bruel, "Silicon on insulator material technology," Electron. Lett., vol. 31, no. 14, pp. 1201-1202, 1995.