Freestanding, micromachined, multimode silicon optical waveguides at λ = 1.3 μm for microelectromechanical systems technology

Applied Optics

Volumn 37, Issue 36, 1998, Pages 8397-8399

  Burcham, Kevin E ^a   Boyd, Joseph T ^a  

^a University of Cincinnati   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001345903     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.37.008397     Document Type: Article

References (11)

1. R. A. Soref and J. P. Lorenzo, “Single-crystal silicon: a new material for 1.3 and 1.6 p.m integrated-optical components, ” Electron. Lett. 21, 953-954 (1985).
2. 2, ” IEEE J. Quantum Electron. 27, 1971-1974 (1991).
3. B. Schuppert, J. Schmidtchen, A. Splett, U. Fischer, T. Zinke, R. Moosburger, and K. Petermann, “Integrated optics in silicon and SiGe-heterostructures, ” J. Lightwave Technol. 14, 2311-2323 (1996).
4. A. Cutolo, M. Iodice, P. Spirito, and L. Zeni, “Silicon electrooptic modulator based on a three terminal device integrated in a low-loss single-mode SOI waveguide, ” J. Lightwave Technol. 15, 505-518 (1997).
5. T. T. H. Eng, S. C. Kan, and G. K. L. Wong, “Surface-micromachined epitaxial silicon cantilevers as movable optical waveguides on silicon-on-insulator substrates, ” Sensors Actuators A 49, 109-113 (1995).
6. S. Yegnanarayanan, P. D. Trinh, F. Coppinger, and B. Jalali, “Compact silicon-based integrated optic time delays, ” IEEE Photon. Technol. Lett. 9, 634-635 (1997).
7. 2 microring resonator optical channel dropping filters, ” IEEE Photon. Technol. Lett. 10, 549-551 (1998).
8. T. T. H. Eng, J. Y. L. Ho, P. W. L. Chan, S. C. Kan, and G. K. L. Wong, “Large core (-60 p.m) SOI multimode waveguides for optical interconnects, ” IEEE Photon. Technol. Lett. 8, 1196-1198 (1996).
9. L. Y. Lin, S. S. Lee, K. S. J. Pister, and M. C. Wu, “Micromachined three-dimensional micro-optics for integrated freespace optical system, ” IEEE Photon. Technol. Lett. 6, 1445-1447 (1994).
10. M. Kumar, J. T. Boyd, H. E. Jackson, J. M. Zavada, H. A. Jenkinson, R. G. Wilson, B. Theys, and J. Chevallier, “Channel optical waveguides formed by deuterium passivation in GaAs and InP, ” J. Appl. Phys. 82, 3205-3213 (1997).
11. V. Subramaniam, G. N. De Brabander, D. H. Naghski, and J. T. Boyd, “Measurement of mode field profiles and bending and transition losses in curved optical channel waveguides, ” J. Lightwave Technol. 15, 990-997 (1997).