0.15 dB/cm loss in Unibond SOI waveguides

Electronics Letters

Volumn 35, Issue 12, 1999, Pages 977-978

  Ang, T W ^a   Reed, G T ^a   Vonsovici, A ^a   Evans, A G R ^b   Routley, P R ^b   Josey, M R ^b  

^a UNIVERSITY OF SURREY   (United Kingdom)

^b UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

COSTS; DIFFRACTION GRATINGS; INTEGRATED OPTOELECTRONICS; LIGHT POLARIZATION; SILICON ON INSULATOR TECHNOLOGY; WAVEGUIDE COUPLERS;

GRATING COUPLERS; OPTICAL LOSS;

OPTICAL WAVEGUIDES;

EID: 0032687692     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:19990689     Document Type: Article

References (8)

1. BRUEL, M.: 'Silicon on insulator material technology', Electron. Lett., 1995, 31, (14), pp. 1201-1202
2. AUBERTON-HERVE, A.J., BRUEL, M., ASPAR, B., MALEVILLE, C., and MORICEAU, H.: 'Smart Cut: the basic fabrication process for Unibond SOI wafers', IEICE Trans. Electron., 1997, E80-C, (3), pp. 358-363
3. MUNTEANU, D., MALEVILLE, C., CRISTOLOVEANU, S., MORICEAU, H., ASPAR, B., RAYNAUD, C., FAYNOT, O., PELLOIE, J.-L., and AUBERTON-HERVE, A.-J.: 'Detailed characteristion of Unibond material', Microelectron. Eng., 1997, 36, pp. 395-398
4. REED, G.T., LI, J.H., TANG, C.K., LU, C.L., HEMMENT, P.L.F., and RICKMAN, A.G.: 'Silicon on insulator optical waveguides formed by direct wafer bonding', Mater. Sci. Eng., 1992, B15, pp. 156-159
5. RICKMAN, A.G., REED, G.T., WEISS, B.L., and NAMAVAR, P.: 'Low-loss planar optical waveguides fabricated in SI MOX material', IEEE Photonics Technol. Lett., 1992, 4, (6), pp. 633-635
6. FISCHER, U., ZINKE, T., KROPP, J.-R., ARNDT, F., and PETERMANN, K.: '0.1 dB/cm waveguide losses in single-mode SOI rib waveguides', IEEE Photonics Technol. Lett., 1996, 8, (5), pp. 633-635
7. ANG, T.W., REED, G.T., VONSOVICI, A., EVANS, A.G.R., ROUTLEY, P.R., BLACKBURN, T., and JOSEY, M.R.: 'Grating couplers using silicon-on-insulator'. Proc. SPIE, January 1999, 3620, pp. 79-86
8. ANG, T.W., REED, G.T., VONSOVICI, A., EVANS, A.C.R., ROUTLEY, P.R., BLACKBURN, T., and JOSEY, M.R.: 'Silicon-on-insulator based grating couplers'. Proc. PREP '99, UMIST, Manchester, UK, 1999, pp. 108-110