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Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 186, Issue 1-4, 2002, Pages 339-343

A kinetic lattice Monte-Carlo approach to the evolution of boron in silicon

(3) Strobel, M a,b La Magna, A b Coffa, S b,c

a UNIVERSITY OF MILAN (Italy)

b CNR IMETEM (Italy)

c STMICROELECTRONICS (Italy)

Author keywords

Boron; Boron interstitial cluster; Defects in doped silicon; Kinetic lattice Monte Carlo modeling; Silicon

Indexed keywords

COMPUTER SIMULATION; CRYSTAL DEFECTS; CRYSTAL LATTICES; DIFFUSION; ION IMPLANTATION; LATTICE CONSTANTS; MATHEMATICAL MODELS; MONTE CARLO METHODS; SEMICONDUCTING BORON;

GEOMETRICAL DISTORTIONS;

SEMICONDUCTING SILICON;

EID: 0036136060 PISSN: 0168583X EISSN: None Source Type: Journal
DOI: 10.1016/S0168-583X(01)00916-8 Document Type: Article

Times cited : (12)

References (23)

1
- 33746343244
- (1989) Rev. Mod. Phys. , vol.61 , pp. 289
- Fahey, P.M.¹ Griffin, P.B.² Plummer, J.D.³

2
- 0005346036
- (1997) J. Appl. Phys. , vol.81 , pp. 6031
- Stolk, P.A.¹ Gossmann, H.-J.² Eaglesham, D.J.³ Jacobson, D.C.⁴ Rafferty, C.S.⁵ Gilmer, G.H.⁶ Jaraiz, M.⁷ Poate, J.M.⁸ Luftman, H.S.⁹ Haynes, T.E.¹⁰

3
- 36449002123
- (1995) Appl. Phys. Lett. , vol.66 , pp. 568
- Stolk, P.A.¹ Gossmann, H.-J.² Eaglesham, D.J.³ Jacobson, D.C.⁴ Poate, J.M.⁵

4
- 0001739179
- (1999) Phys. Rev. Lett. , vol.83 , pp. 4341
- Sadigh, B.¹ Lenosky, T.J.² Theiss, S.K.³ Caturla, M.-J.⁴ Diaz de la Rubia, T.⁵ Foad, M.A.⁶

5
- 0000065634
- (1999) Phys. Rev. Lett. , vol.83 , pp. 4345
- Windl, W.¹ Bunea, M.M.² Stumpf, R.³ Dunham, S.T.⁴ Masquelier, M.P.⁵

6
- 0000016244
- (2000) Phys. Rev. B , vol.61 , pp. 8155
- Hakala, M.¹ Puska, M.J.² Nieminen, R.M.³

7
- 0000139472
- (2000) Appl. Phys. Lett. , vol.77 , pp. 1834
- Lenosky, T.J.¹ Sadigh, B.² Theiss, S.K.³ Caturla, M.-J.⁴ Diaz de la Rubia, T.⁵

8
- 0000962139
- (2000) Appl. Phys. Lett. , vol.77 , pp. 2018
- Liu, X.-Y.¹ Windl, W.² Masquelier, M.P.³

9
- 0001471414
- (1998) J. Appl. Phys. , vol.84 , pp. 2476
- Luo, W.¹ Rasband, P.B.² Clancy, P.³ Roberts, B.W.⁴

10
- 0001464240
- (2001) J. Appl. Phys. , vol.89 , pp. 1596
- Luo, W.¹ Clancy, P.²

11
- 4244092107
- in press
- (2001) Phys. Rev. B
- Alippi, P.¹ Colombo, L.² Ruggerone, P.³ Sieck, A.⁴ Seifert, G.⁵ Frauenheim, T.⁶

12
- 0001282491
- (1997) Appl. Phys. Lett. , vol.70 , pp. 2285
- Pelaz, L.¹ Jaraiz, M.² Gilmer, G.H.³ Gossmann, H.-J.⁴ Rafferty, C.S.⁵ Eaglesham, D.J.⁶ Poate, J.M.⁷

13
- 0000569193
- (1998) Appl. Phys. Lett. , vol.72 , pp. 2736
- Caturla, M.-J.¹ Johnson, M.D.² Diaz de la Rubia, T.³

14
- 0007505884
- (1998) J. Appl. Phys. , vol.84 , pp. 4781
- Uematsu, M.¹

15
- 0344180046
- (1999) Phys. Rev. Lett. , vol.82 , pp. 1720
- La Magna, A.¹ Coffa, S.² Colombo, L.³

16
- 0035335199
- (2001) Nucl. Instr. and Meth. B , vol.178 , pp. 154
- La Magna, A.¹ Coffa, S.² Libertino, S.³ Brambilla, L.⁴ Alippi, P.⁵ Colombo, L.⁶

17
- 0032121620
- (1998) J. Mater. Res. , vol.13 , pp. 1786
- Aselage, T.L.¹

18
- 0001576382
- (1993) Appl. Phys. Lett. , vol.63 , pp. 373
- Mizushima, I.¹ Watanabe, M.² Murakoshi, A.³ Hotta, M.⁴ Kashiwagi, M.⁵ Yoshiki, M.⁶

19
- 0007581394
- to be published
- La Magna, A.¹ Strobel, M.²

20
- 0038100690
- (2000) Nucl. Instr. and Meth. B , vol.164-165 , pp. 431
- Perez-Martin, A.M.C.¹ Dominguez-Vazquez, J.² Jimenez-Rodriguez, J.J.³

21
- 14344268603
- (2001) Phys. Rev. Lett. , vol.86 , pp. 1247
- Estreicher, S.K.¹ Gharaibeh, M.² Fedders, P.A.³ Ordejon, P.⁴

22
- 0002534281
- (2000) Comp. Mater. Sci. , vol.17 , pp. 21
- La Magna, A.¹ Coffa, S.²

23
- 0000490788
- (1999) J. Chem. Phys. , vol.110 , pp. 9608
- Sahara, R.¹ Mizuseki, H.² Ohno, K.³ Uda, S.⁴ Fukuda, T.⁵ Kawazoe, Y.⁶

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