Monte-Carlo methods for chemical-mechanical planarization on multiple-layer and dual-material models

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4692, Issue , 2002, Pages 421-432

  Chen, Yu ^a   Kahng, Andrew B ^a   Robins, Gabriel ^a   Zelikovsky, Alexander ^a  

^a University of California   (United States)

Author keywords

CMP; Greedy; Monte Carlo; Multiple layer; STI

Indexed keywords

DIELECTRIC MATERIALS; LINEAR PROGRAMMING; MONTE CARLO METHODS; VLSI CIRCUITS;

CHEMICAL-MECHANICAL PLANARIZATION;

INTEGRATED CIRCUIT LAYOUT;

EID: 0036030256     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.475677     Document Type: Conference Paper

References (16)

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