Practical iterated fill synthesis for CMP uniformity

Proceedings - Design Automation Conference

Volumn , Issue , 2000, Pages 671-674

  Chen, Yu ^a   Kahng, Andrew B ^a   Robins, Gabriel ^a   Zelikovsky, Alexander ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; CHEMICAL POLISHING; ITERATIVE METHODS; LINEAR PROGRAMMING; MONTE CARLO METHODS;

CHEMICAL MECHANICAL POLISHING UNIFORMITY; GREEDY ALGORITHMS; LAYOUT DENSITY CONTROL;

INTEGRATED CIRCUIT LAYOUT;

EID: 0033725718     PISSN: 0738100X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1145/337292.337610     Document Type: Conference Paper

References (9)