Morphology and phase of tin oxide thin films during their growth from the metallic tin

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 3, 1997, Pages 1108-1112

  Chung, Y S ^a   Hubenko, A ^a   Meyering, L ^a   Schade, M ^a   Zimmer, J ^a   Remmel, T ^a  

^a MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0006784570     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580438     Document Type: Article

References (14)

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