Advances in broadband radio-frequency sensing for real-time control of plasma-based semiconductor processing

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 4, 1999, Pages 1377-1383

  Garvin, Craig ^a   Grimard, Dennis S ^a   Grizzle, J W ^a  

^a Electronics Mfg Contr Syst Lab   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000075930     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581823     Document Type: Article

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