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Volumn 86, Issue 8, 1999, Pages 4100-4106

A noninvasive rf probe for the study of ionization and dissociation processes in technological plasmas

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Indexed keywords


EID: 0003229472     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.371334     Document Type: Article
Times cited : (7)

References (26)
  • 2
    • 3242871396 scopus 로고
    • A. J. van Roosmaien, J. Appl. Phys. 42, 416 (1983); A. J. van Roosmaien, W. G. M. van den Hoek, and H. Kalter, ibid. 58, 653 (1985).
    • (1983) J. Appl. Phys. , vol.42 , pp. 416
    • Van Roosmaien, A.J.1
  • 4
    • 33847535991 scopus 로고
    • M. A. Sobolewski, J. Vac. Sci. Technol. A 10, 3550 (1992); M. A. Sobolewski, J. Res. Natl. Inst. Stand. Technol. 100, 341 (1995).
    • (1992) J. Vac. Sci. Technol. A , vol.10 , pp. 3550
    • Sobolewski, M.A.1
  • 10
    • 0032296516 scopus 로고    scopus 로고
    • C. Garvin, D. Grimard, J. W. Grizzle, and B. E. Gilchrist, J. Vac. Sci. Technol. A 16, 595 (1998); H. M. Park, C. Garin, and J. W. Grizzle, J. Electrochem. Soc. 145, 4247 (1998).
    • (1998) J. Electrochem. Soc. , vol.145 , pp. 4247
    • Park, H.M.1    Garin, C.2    Grizzle, J.W.3
  • 22
    • 0347570890 scopus 로고    scopus 로고
    • V. J. Law, Vacuum 51, 463 (1998).
    • (1998) Vacuum , vol.51 , pp. 463
    • Law, V.J.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.