Harmonic characterisation of a plasma-tool using a diplexer

Vacuum

Volumn 52, Issue 4, 1999, Pages 509-514

  Batty, I ^a   Cooke, M ^b   Law, V J ^c  

^a Mole Communications Ltd Unit C1   (United Kingdom)

^b OXFORD INSTRUMENTS PLASMA TECHNOLOGY   (United Kingdom)

^c UNIVERSITY COLLEGE LONDON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

HELIUM; NATURAL FREQUENCIES; NITROGEN; SPECTRUM ANALYSIS;

DIPLEXER; PLASMA TOOL;

PLASMA PROBES;

EID: 0032623715     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(98)00341-8     Document Type: Article

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