Piezoelectric response of PZT thin film actuated micromachined silicon cantilever beams

IEEE International Symposium on Applications of Ferroelectrics

Volumn , Issue , 1994, Pages 520-522

  Brooks, K G ^a   Damjanovic, D ^a   Setter, N ^a   Luginbuhl, Ph ^a   Racine, G A ^a   De Rooij, N F ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CERAMIC MATERIALS; ELECTRIC IMPEDANCE MEASUREMENT; FILM PREPARATION; LEAD COMPOUNDS; NATURAL FREQUENCIES; PIEZOELECTRICITY; PLASMA ETCHING; SILICON WAFERS; THICKNESS MEASUREMENT;

EFFECTIVE ELASTIC CONSTANT; ELECTROMECHANICAL COUPLING FACTOR; LEAD ZIRCONIUM TITANATE; PROFILOMETRY; SPIN COATING;

THIN FILMS;

EID: 0028716245     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)