Fabrication of suspended piezoelectric microresonators

Integrated Ferroelectrics

Volumn 24, Issue 1, 1999, Pages 147-154

  Piekarski, B ^a   Dubey, M ^a   Devoe, D ^b   Zakar, E ^a   Zeto, R ^a   Conrad, J ^a   Piekarz, R ^a   Ervin, M ^a  

^a U S ARMY RESEARCH LABORATORY   (United States)

^b UNIVERSITY OF MARYLAND   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODES; LEAD COMPOUNDS; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRIC DEVICES; PIEZOELECTRIC MATERIALS; PLATINUM; REACTIVE ION ETCHING; SILICA; SPUTTER DEPOSITION; THIN FILMS;

LEAD ZIRCONATE TITANATE; MICROELECTROMECHANICAL RESONATOR; SILICON DEEP REACTIVE ION ETCHING;

CRYSTAL RESONATORS;

EID: 0033293024     PISSN: 10584587     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1080/10584589908215587     Document Type: Article

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