Amorphous silicon crystallization and polysilicon thin film transistors on SiO 2 passivated steel foil substrates

Applied Surface Science

Volumn 175-176, Issue , 2001, Pages 753-758

  Wu, Ming ^a   Wagner, Sigurd ^a  

^a Princeton University   (United States)

Author keywords

Crystallization; Polysilicon; Steel substrate; Thermal oxidation; Thin film transistor

Indexed keywords

AMORPHOUS SILICON; CRYSTALLIZATION; DEPOSITION; ION IMPLANTATION; PASSIVATION; POLYCRYSTALLINE MATERIALS; POLYSILICON; SILICA; SUBSTRATES; THERMOOXIDATION;

PASSIVATED STEEL SUBSTRATES; POLYCRYSTALLINE SILICON;

THIN FILM TRANSISTORS;

EID: 0035873765     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(01)00168-4     Document Type: Article

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