Hybrid amorphous and polycrystalline silicon devices for large-area electronics

Materials Research Society Symposium - Proceedings

Volumn 508, Issue , 1998, Pages 3-12

  Mei, P ^a   Boyce, J B ^a   Fork, D K ^a   Anderson, G ^a   Ho, J ^a   Lu, J ^a   Hack, M ^a   Lujan, R ^a  

^a PALO ALTO RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; LASER APPLICATIONS; POLYCRYSTALLINE MATERIALS; SEMICONDUCTOR DEVICE MANUFACTURE;

POLYSILICON DEVICES;

THIN FILM TRANSISTORS;

EID: 0032314581     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-508-3     Document Type: Conference Paper

References (13)