Hydrogen plasma-enhanced crystallization of amorphous silicon for low-temperature polycrystalline silicon TFT's

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 1998, Pages 261-264

  Pangal, K ^a   Sturm, J C ^a   Wagner, S ^a  

^a PRINCETON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; CRYSTALLIZATION; HYDROGEN; PLASMA APPLICATIONS; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING FILMS; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE;

PLASMA-INDUCED CRYSTALLIZATION;

THIN FILM TRANSISTORS;

EID: 0032271793     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)