Development of surface micromachined magnetic actuators using electroplated permalloy

Mechatronics

Volumn 8, Issue 5, 1998, Pages 613-633

  Liu, Chang ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROELECTROMECHANICAL DEVICES; MICROMACHINING; POLYCRYSTALLINE MATERIALS; SILICON; THIN FILMS;

ELECTROPLATED PERMALLOYS; FORCE GENERATION; MAGNETIC ACTUATORS; MAGNETIC INTERACTION;

MICROACTUATORS;

EID: 0032136405     PISSN: 09574158     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0957-4158(98)00016-6     Document Type: Article

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