High-yield wafer chuck for single-sided wet etching of MEMS structures

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 1, Issue , 1997, Pages 711-713

  Brugger, J ^a   Beljakovic, G ^a   Despont, M ^a   Biebuyck, H ^a   de Rooij, N F ^a   Vettiger, P ^a  

^a IBM RESEARCH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; GASKETS; SILICA; SILICON WAFERS;

SINGLE SIDED WET ETCHING;

MICROELECTROMECHANICAL DEVICES;

EID: 0030650534     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)