Silicon elastomer as a protective layer in 3D microfabrication of micro-opto-electro-mechanical systems

Sensors and Actuators, A: Physical

Volumn 74, Issue 1, 1999, Pages 24-26

  Obreja, Paula ^a   Muller, Raluca ^a   Manea, Elena ^a  

^a NATIONAL INSTITUTE FOR RESEARCH AND DEVELOPMENT IN MICROTECHNOLOGIES   (Romania)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; ELASTOMERS; ETCHING; MICROELECTROMECHANICAL DEVICES; THREE DIMENSIONAL;

MICRO OPTO ELECTRO MECHANICAL SYSTEMS; MICROFABRICATION; PROTECTIVE LAYER; SILICON ELASTOMER; SILICON ETCHING; SILICON MEMBRANES;

SILICON WAFERS;

EID: 0032664851     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00329-X     Document Type: Article

References (5)

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