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Volumn 492, Issue 1-2, 2001, Pages 115-124
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Electrochemical nucleation and growth of copper on Si(1 1 1)
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Author keywords
Active sites; Annealing; Atomic force microscopy; Copper; Electrodeposition; Nucleation; Silicon
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
COPPER;
DIFFUSION;
ELECTRODEPOSITION;
MONOLAYERS;
NUCLEATION;
SEMICONDUCTING SILICON;
ELECTROCHEMICAL NUCLEATION;
THIN FILMS;
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EID: 0035840963
PISSN: 00396028
EISSN: None
Source Type: Journal
DOI: 10.1016/S0039-6028(01)01410-8 Document Type: Article |
Times cited : (60)
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References (28)
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