Thermal desorption spectra from cavities in helium-implanted silicon

Physical Review B - Condensed Matter and Materials Physics

Volumn 61, Issue 15, 2000, Pages 10183-10193

  Cerofolini, G ^a   Calzolari, G ^b   Corni, F ^b   Frabboni, S ^b   Nobili, C ^b   Ottaviani, G ^b   Tonini, R ^b  

^a STMICROELECTRONICS   (Italy)

^b UNIVERSITY OF MODENA AND REGGIO EMILIA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0040081173     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.61.10183     Document Type: Article

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