Fabrication of integrated micromachined polymer magnet

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4592, Issue , 2001, Pages 347-354

  Rojanapornpun, Olarn ^a   Kwok, Chee Y ^a  

^a UNIVERSITY OF NEW SOUTH WALES   (Australia)

Author keywords

Composites; Ferrite; Micromachining; Polyimide; Polymer magnetic

Indexed keywords

COMPOSITE MATERIALS; MAGNETS; MICROMACHINING; PHOTOLITHOGRAPHY; POLYMERS; SPIN COATING; SURFACE ROUGHNESS;

POLYMER MAGNETS;

MICROELECTROMECHANICAL DEVICES;

EID: 0035773167     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.448986     Document Type: Article

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