Magnetic and mechanical properties of micromachined strontium ferrite/polyimide composites

Journal of Microelectromechanical Systems

Volumn 6, Issue 4, 1997, Pages 307-312

  Lagorce, Laure K ^b,c   Allen, Mark G ^a,b,d,e,f  

^a IEEE

^b GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^c INSA   (France)

^d UNIVERSITY OF PENNSYLVANIA   (United States)

^e MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^f GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Composite; Ferrite; Magnetic microactuator; Permanent magnet; Polyimide

Indexed keywords

COERCIVE FORCE; COMPOSITE MATERIALS; ELASTIC MODULI; FERRITE; MAGNETIC PROPERTIES; MECHANICAL PROPERTIES; MICROELECTRONIC PROCESSING; PERMANENT MAGNETS; PHOTOLITHOGRAPHY; POLYMERS; RESIDUAL STRESSES; THIN FILMS;

INTRINSIC COERCIVITY; MAGNETIC MICROACTUATOR; MAXIMUM ENERGY PRODUCT; RESIDUAL MAGNETIC FLUX DENSITY;

MICROMACHINING;

EID: 0031342760     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.650127     Document Type: Article

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