Fabrication and experiment of microlegs for an insect-like microrobot

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4568, Issue , 2001, Pages 163-174

  Bonvilain, Agnès ^a   Chaillet, Nicolas ^a  

^a FEMTO ST INSTITUTE   (France)

Author keywords

Insect; Microfabrication; Microlegs; Microrobot; Thermal actuators

Indexed keywords

DEGREES OF FREEDOM (MECHANICS); MICROACTUATORS; MOTION CONTROL; SILICON WAFERS; THERMAL EFFECTS;

THERMAL ACTUATORS;

ROBOTICS;

EID: 0035764106     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.444123     Document Type: Article

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