Application of CD error budget analysis to ArF scanner performance

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4346, Issue 2, 2001, Pages 1587-1598

  Renwick, Stephen P ^a   Brown, Jay M ^a  

^a NIKON PRECISION INC   (United States)

Author keywords

ArF; AWCDU; CD control; ECD; Error budget; OCD; Statistics

Indexed keywords

ARGON; ERROR ANALYSIS; ERROR STATISTICS; LITHOGRAPHY; SCANNING ELECTRON MICROSCOPY;

ERROR BUDGET ANALYSIS; SCANNERS;

SCANNING;

EID: 0035758717     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.435700     Document Type: Conference Paper

References (13)

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