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Volumn 16, Issue 12, 2001, Pages 3526-3535
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Impacts of postannealing ambient atmospheres on Pt/SrBi2.2Ta2O9/Pt capacitors
a a a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
ANNEALING;
CAPACITORS;
COMPOSITION;
DECOMPOSITION;
EVAPORATION;
FERROELECTRICITY;
MORPHOLOGY;
PLATINUM;
POLARIZATION;
STRONTIUM COMPOUNDS;
SUBSTRATES;
THIN FILM DEVICES;
METALORGANIC DECOMPOSITION;
FERROELECTRIC THIN FILMS;
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EID: 0035739545
PISSN: 08842914
EISSN: None
Source Type: Journal
DOI: 10.1557/JMR.2001.0484 Document Type: Article |
Times cited : (1)
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References (21)
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