Analysis of the degradation of PZT and SrBi2Ta2O9 thin films with a reductive process

Integrated Ferroelectrics

Volumn 16, Issue 1-4, 1997, Pages 29-40

  Hase, Takashi ^a   Noguchi, Takehiro ^a   Miyasaka, Yoichi ^a  

^a NEC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CAPACITORS; CRYSTAL STRUCTURE; DEGRADATION; FERROELECTRIC MATERIALS; FERROELECTRICITY; LEAD COMPOUNDS; REDUCTION; STRONTIUM COMPOUNDS; THIN FILMS; TITANIUM NITRIDE;

FERROELECTRIC CAPACITORS; LEAD ZIRCONATE TITANATE;

DIELECTRIC FILMS;

EID: 0031356113     PISSN: 10584587     EISSN: None     Source Type: Journal    
DOI: 10.1080/10584589708013027     Document Type: Article

References (7)

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3. K. Amanuma, T. Hase, and Y. Miyasaka, Appl. Phys. Lett., 66, 221 (1995)
4. C. A. Paz de Araujo, J. D. Cuchiaro, M. C. Scott, and L. D. McMillan, International Patent Publication No. WO 93/12542 (24 June 1993)
5. P. D. Maniar, R. Moazzami, R. E. Jones, A. C. Campbell and C. J. Mogab, Mat. Res. Soc. Symp. Proc., 310, 151 (1993)
6. R. E. Jones, Jr., P. D. Maniar, R. Moazzami, P. Zurcher, J. Z. Witowski, Y. T. Lii, P. Chu and S. J. Gillespie, Thin Solid Films, 270, 584 (1994)
7. R. E. Jones, Jr., P. D. Maniar, A. C. Campbell, R. Moazzami, J. L. Dupuie, R. B. Gregory and M. L. Kottke, Integrated Ferroelectrics, 6, 81 (1995)