Micromechanical silicon scale

CPEM Digest (Conference on Precision Electromagnetic Measurements)

Volumn , Issue , 1998, Pages 106-107

  Sillanpaa, T ^a   Oja, A S ^a   Seppa, H ^a  

^a VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTATIONAL METHODS; MATHEMATICAL MODELS; MICROMACHINING; SEMICONDUCTING SILICON; SINGLE CRYSTALS;

MICROMECHANICAL SILICON SCALE;

CAPACITANCE MEASUREMENT;

EID: 0032293923     PISSN: 05891485     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)