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Volumn 1, Issue , 1995, Pages 130-133
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Integrated electrostatic RMS-to-DC converter using IC-compatible surface micromachining
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Author keywords
[No Author keywords available]
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Indexed keywords
CAPACITORS;
DAMPING;
ELECTRIC CONVERTERS;
ELECTRIC CURRENT MEASUREMENT;
ELECTRIC FIELDS;
ELECTROSTATIC DEVICES;
INTEGRATED CIRCUITS;
MICROELECTRONIC PROCESSING;
MICROMACHINING;
SIGNAL PROCESSING;
ELECTROSTATIC CONVERTERS;
ELECTROSTATIC FORCES;
INPUT SIGNAL;
LOW FREQUENCY ELECTRONIC CIRCUITS;
SURFACE MICROMACHINING MODULES;
THERMAL CONVERTERS;
MICROELECTROMECHANICAL DEVICES;
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EID: 0029542690
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (9)
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References (5)
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