Streaming metal plasma generation by vacuum arc plasma guns

Review of Scientific Instruments

Volumn 69, Issue 2, 1998, Pages 801-803

  Macgill, R A ^a   Dickinson, M R ^a   Anders, A ^a   Monteiro, O R ^a   Brown, I G ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

CATHODES; ION DRIFT; ION IMPLANTATION; ION SOURCES; KEV RANGE; METALS; PERFORMANCE; PLASMA GUNS; PLASMA PRODUCTION; USES; VACUUM SYSTEMS

Indexed keywords

EID: 79958864021     PISSN: 00346748     EISSN: 10897623     Source Type: Journal    
DOI: 10.1063/1.1148718     Document Type: Conference Paper

References (12)

1. R. W. Wood, Phys. Rev. Ser. I PHRVAO 5, 1 (1897).
2. Vacuum Arcs-Theory and Application, edited by J. M. Lafferty (Wiley, New York, 1980).
3. Vacuum Arc Science and Technology, edited by R. L. Boxman, P. Martin, and D. Sanders (Noyes, New York, 1995).
4. For a most impressive and comprehensive bibliography of the vacuum arc literature see H. C. Miller, “A Bibliography and Author Index for Electrical Discharges in Vacuum (1897–1986)”, published by the General Electric Co., document No. GEPP-TIS-366e (UC-13), March 1988
5. also published in part in H. C. Miller, IEEE Trans. Electron. Insul. IETIAX 25, 765 (1990)
6. H. C. Miller, IEEE Trans. Electron. Insul. 26, 949 (1991).
7. See the Special Issues on Vacuum Discharge Plasmas in IEEE Trans. Plasma Sci. These issues contain selected papers from the biennial International Symposia on Discharges and Electrical Insulation in Vacuum. (usually in the October issues in odd-numbered years).
8. I. G. Brown, J. E. Galvin, and R. A. MacGill, Appl. Phys. Lett. APPLAB 47, 358 (1985).
9. See Rev. Sci. Instrum. 65, 3082 (1994) for a collection of papers on this topic by a number of authors from laboratories around the world.
10. I. G. Brown and X. Godechot, IEEE Trans. Plasma Sci. ITPSBD PS-19, 713 (1991).
11. A. Anders, S. Anders, and I. G. Brown, Plasma Sources Sci. Technol. PSTEEU 4, 1 (1995).
12. A. Anders, I. G. Brown, R. A. MacGill, and M. R. Dickinson, J. Phys. D: Appl. Phys. (to be published).