Plasma-immersion ion implantation

MRS Bulletin

Volumn 21, Issue 8, 1996, Pages 52-56

  Mantese, Joseph V ^a   Brown, Ian G ^a   Cheung, Nathan W ^a   Collins, George A ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0004783686     PISSN: 08837694     EISSN: None     Source Type: Journal    
DOI: 10.1557/S0883769400035727     Document Type: Article

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